Curved Cantilever Actuated ScAlN PMUT for Enhanced Linearity and Transmit Sensitivity

This research introduces a novel curved cantilever-based edge-actuated Piezoelectric Micromachined Ultrasonic Transducer (PMUT) utilizing a 30% Scandium-doped Aluminum Nitride (ScAlN) thin film. The cantilever-actuated PMUT achieves a linear piston-mode operation, with 75% of the membrane area vibra...

Full description

Saved in:
Bibliographic Details
Main Authors: Trivedi, Shyam, Goh, Duan Jian, Ramegowda, Prakasha Chigahalli, Choong, David Sze Wai, Liu, Jihang, Chen, Daniel Ssu-Han, Teo, Yong Shun, Merugu, Srinivas, Yan, Hong, Zhang, Qing Xin, Koh, Yul, Leotti, Alberto, Shankar, Ravi, Zakiyyan, Naadaa Ghulaam, Das, Amal, Lazzari, Carla
Format: Conference Proceeding
Language:English
Subjects:
Acoustics
Air-coupled
Aluminum nitride
Cantilever
Edge-actuation
Frequency control
III-V semiconductor materials
Linearity
Piezoelectric films
Pistons
PMUT
ScAlN
Sensitivity
Ultrasonic
Ultrasonic transducer arrays
Ultrasonic transducers
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:This research introduces a novel curved cantilever-based edge-actuated Piezoelectric Micromachined Ultrasonic Transducer (PMUT) utilizing a 30% Scandium-doped Aluminum Nitride (ScAlN) thin film. The cantilever-actuated PMUT achieves a linear piston-mode operation, with 75% of the membrane area vibrating in the vertical direction. In contrast to traditional PMUTs, this design operates at 63 kHz and features a flat vibrating membrane that remains frequency insensitive to DC voltage variation. It effectively maintains linear displacement and pressure response, even at driving voltages exceeding 50 V. At similar operating frequencies, the cantilever-actuated PMUT exhibits a displacement sensitivity of 700 nm/V, comparable to the 900 nm/V of the conventional PMUT. Additionally, the edge-actuated PMUT offers improved linearity and a Figure of Merit (FOM) of 65 mPa/V/mm 2 in transmission, which is 1.5 times larger than that of the conventional clamped PMUT.
ISSN:2375-0448
DOI:10.1109/UFFC-JS60046.2024.10794053