Single-chip surface micromachined integrated gyroscope with 50/spl deg//h Allan deviation

The design principles of a mass-produced surface micromachined gyroscope are described. The device is integrated on a single 3 mm/spl times/3 mm chip with a 3-/spl mu/m BiCMOS process. It has a 4-/spl mu/m-thick polysilicon structure, 5-V 6-mA supply, 12.5-mV//spl deg//S sensitivity, 10 000:1 dynami...

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Bibliographic Details
Published in:IEEE journal of solid-state circuits 2002-12, Vol.37 (12), p.1860-1866
Main Authors: Geen, J.A., Sherman, S.J., Chang, J.F., Lewis, S.R.
Format: Article
Language:English
Subjects:
Acceleration
Accelerometers
BiCMOS integrated circuits
Displacement measurement
Force measurement
Gyroscopes
Impedance
Resonant frequency
Signal resolution
Substrates
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Description
Summary:The design principles of a mass-produced surface micromachined gyroscope are described. The device is integrated on a single 3 mm/spl times/3 mm chip with a 3-/spl mu/m BiCMOS process. It has a 4-/spl mu/m-thick polysilicon structure, 5-V 6-mA supply, 12.5-mV//spl deg//S sensitivity, 10 000:1 dynamic range, 30 000-gee shock survival, and -55/spl deg/C to +85/spl deg/C operating temperature.
ISSN:0018-9200
1558-173X
DOI:10.1109/JSSC.2002.804345