Stimulation of diamond growth on optically transparent non-conductive substrates

Diamond layers have been deposited by hot filament CVD on sapphire and glass substrates pre-treated by diamond grain seeding and by AC biasing. The quality of diamond layers has been evaluated by Raman spectroscopy. Diamond layers of different quality have been obtained as confirmed by detecting var...

Full description

Saved in:
Bibliographic Details
Main Authors: Kadlecikova, M., Breza, J., Vesely, M., Luptakova, V., Balon, F., Vojackova, A., Kral, J., Janik, J., Kromka, A.
Format: Conference Proceeding
Language:English
Subjects:
Atomic layer deposition
Atomic measurements
Chemical vapor deposition
Hydrogen
Optical films
Plasma temperature
Powders
Rough surfaces
Stimulated emission
Surface roughness
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:Diamond layers have been deposited by hot filament CVD on sapphire and glass substrates pre-treated by diamond grain seeding and by AC biasing. The quality of diamond layers has been evaluated by Raman spectroscopy. Diamond layers of different quality have been obtained as confirmed by detecting various Raman bands attributable to different forms of carbon.
DOI:10.1109/ASDAM.2002.1088515