Surface Phenomena in Electronics Interconnection Technology-A Review

Surface phenomena are often at the origin of interconnection problems and it is necessary to study them with suitable analytical techniques. Auger electron spectroscopy (AES) is used here to establish the cause of observed failures at different levels of electronic interconnection. Failures are rela...

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Bibliographic Details
Published in:IEEE transactions on components, hybrids, and manufacturing technology hybrids, and manufacturing technology, 1982-06, Vol.5 (2), p.217-224
Main Authors: Tissier, G., Gressus, C., Bouygues, J.
Format: Article
Language:English
Subjects:
Atomic measurements
Degradation
Electron emission
Integrated circuit interconnections
Manufacturing industries
Manufacturing processes
Scanning electron microscopy
Spectroscopy
Surface contamination
Surface treatment
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Summary:Surface phenomena are often at the origin of interconnection problems and it is necessary to study them with suitable analytical techniques. Auger electron spectroscopy (AES) is used here to establish the cause of observed failures at different levels of electronic interconnection. Failures are related to contamination: the most frequently encountered contaminants are carbonaceous compounds. It is suggested that manufacturing processes are the principal cause of such contaminants.
ISSN:0148-6411
1558-3082
DOI:10.1109/TCHMT.1982.1135965