Ferroelectric thin film ultrasonic micromotors

Ferroelectric thin films of lead zirconate titanate (PZT) of morphotropic phase-boundary composition have been fabricated by a sol-gel spin-on technique for application to a new family of flexure-wave piezoelectric micromotors characterized by low speed and high torque. The high relative dielectric...

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Bibliographic Details
Main Authors: Udayakumar, K.R., Bart, S.F., Flynn, A.M., Chen, J., Tavrow, L.S., Cross, L.E., Brooks, R.A., Ehrlich, D.J.
Format: Conference Proceeding
Language:English
Subjects:
Dielectric breakdown
Dielectric measurements
Dielectric thin films
Ferroelectric materials
High-K gate dielectrics
Micromotors
Piezoelectric films
Titanium compounds
Torque
Transistors
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Summary:Ferroelectric thin films of lead zirconate titanate (PZT) of morphotropic phase-boundary composition have been fabricated by a sol-gel spin-on technique for application to a new family of flexure-wave piezoelectric micromotors characterized by low speed and high torque. The high relative dielectric constant (1300) and breakdown strength (1 MV/cm) of the films lead to high stored energy densities. The piezoelectric coefficients d/sub 33/ and d/sub 31/ were measured to be 220 pC/N and -88 pC/N, respectively; the electromechanical coupling factors calculated from these data were k/sub 33/=0.49, k/sub 31/=0.22, and k/sub p/=0.32. The development of the piezoelectric ultrasonic micromotors from the PZT thin films and the architecture of the stator structure are described. Nonoptimized prototype micromotors show rotational velocities of 100-300 rpm and net normalized torques in the pN-m/V/sup 2/ range.< >
DOI:10.1109/MEMSYS.1991.114779