Optical excitation of micro-mechanical resonators

The authors present theoretical and experimental studies on optothermal excitation of bending-mode micromechanical resonators. The theory results in a prediction of induced bending moment (modulus and phase) as a function of the excitation frequency, the geometry of the structure, and material prope...

Full description

Saved in:
Bibliographic Details
Main Authors: Lammerink, T.S.J., Elwenspoek, M., Fluitman, J.H.J.
Format: Conference Proceeding
Language:English
Subjects:
Absorption
Frequency measurement
Optical interferometry
Optical resonators
Optical sensors
Resonance
Resonant frequency
Temperature distribution
Thermal stresses
Vibration measurement
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:The authors present theoretical and experimental studies on optothermal excitation of bending-mode micromechanical resonators. The theory results in a prediction of induced bending moment (modulus and phase) as a function of the excitation frequency, the geometry of the structure, and material properties. It is shown that decisive roles are played by the absorption length of the material mu , the penetration depth of a thermal wave delta , and the thickness of the resonator. delta is a function of the excitation frequency while the resonance frequency depends on h. The theory results in design rules for optothermal resonators. It is shown that absorbing layers improve the efficiency of the optothermal transduction only in the case of transparent materials. Experiments agree well with theory.< >
DOI:10.1109/MEMSYS.1991.114788