Design for reliability of MEMS/MOEMS for lightwave telecommunications

The influences of materials systems, processing subtleties, and reliability requirements on the design, flexibility, functionality and commercialization of MOEMS are complex. A tight interdependent feedback loop between component/subsystem/system design, fabrication, packaging, manufacturing and rel...

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Bibliographic Details
Main Authors: Shea, H.R., Arney, S., Gasparyan, A., Haueis, M., Aksyuk, V.A., Bolle, C.A., Frahm, R.E., Goyal, S., Pardo, F., Simon, M.E.
Format: Conference Proceeding
Language:English
Subjects:
Failure analysis
Microelectromechanical devices
Micromechanical devices
Optical attenuators
Optical device fabrication
Optical devices
Optical feedback
Optical fiber networks
Optical modulation
Packaging
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Summary:The influences of materials systems, processing subtleties, and reliability requirements on the design, flexibility, functionality and commercialization of MOEMS are complex. A tight interdependent feedback loop between component/subsystem/system design, fabrication, packaging, manufacturing and reliability is described as a strategy for building reliability into emerging MOEMS products while accelerating commercialization.
ISSN:1092-8081
2766-1733
DOI:10.1109/LEOS.2002.1159357