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Carbon diamond-like film in GaAs MDS-structures

MDS-structures on basis of gallium-arsenide (GaAs) and carbon diamond-like film (CDLF) are experimentally investigated. The attempt is made to estimate influence of CDLF quality on volt-ampere characteristics of MDS-structures by use laser irradiation for improvement of CDLF quality.

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Bibliographic Details
Main Authors: Beletsky, N.I., Polyansky, N.E., Mishnyov, A.A.
Format: Conference Proceeding
Language:eng ; rus
Subjects:
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Summary:MDS-structures on basis of gallium-arsenide (GaAs) and carbon diamond-like film (CDLF) are experimentally investigated. The attempt is made to estimate influence of CDLF quality on volt-ampere characteristics of MDS-structures by use laser irradiation for improvement of CDLF quality.
DOI:10.1109/CRMICO.2001.961630