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Polymeric integrated circuits: fabrication and first characterisation
A technology to fabricate polymeric integrated circuits on 150-mm foils is presented. The technology is demonstrated with functional code generators. The integration level is about 700 transistors. The yield of the circuits has been measured as function of the complexity and has been correlated with...
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Main Authors: | , , , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Citations: | Items that cite this one |
Online Access: | Request full text |
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Summary: | A technology to fabricate polymeric integrated circuits on 150-mm foils is presented. The technology is demonstrated with functional code generators. The integration level is about 700 transistors. The yield of the circuits has been measured as function of the complexity and has been correlated with intrinsic noise margin of the logic gates. |
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DOI: | 10.1109/IEDM.2002.1175836 |