Self-assembled out-of-plane high-Q integrated inductors

Self-assembled high-quality (Q) factor, 3-D inductors were batch-fabricated. The out-of-plane geometry reduces eddy current and skin effect losses. Coils achieve Q-factors over 70 on both glass and 15-20 /spl Omega/-cm Si at 1 GHz. 3-D coil LC oscillators had 12.3 dB lower phase-noise versus spiral...

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Bibliographic Details
Main Authors: Van Schuylenbergh, K., Chua, C.L., Fork, D.K., Jeng-Ping Lu, Griffiths, B.
Format: Conference Proceeding
Language:English
Subjects:
Applied sciences
Circuit properties
Coils
Design. Technologies. Operation analysis. Testing
Eddy currents
Electric, optical and optoelectronic circuits
Electronic circuits
Electronics
Encapsulation
Exact sciences and technology
Geometry
Glass
Inductors
Integrated circuits
Magnetic devices
Oscillators
Oscillators, resonators, synthetizers
Q factor
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
Skin effect
Spirals
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Summary:Self-assembled high-quality (Q) factor, 3-D inductors were batch-fabricated. The out-of-plane geometry reduces eddy current and skin effect losses. Coils achieve Q-factors over 70 on both glass and 15-20 /spl Omega/-cm Si at 1 GHz. 3-D coil LC oscillators had 12.3 dB lower phase-noise versus spiral coils. Encapsulation affected neither phase noise nor Q-factor.
DOI:10.1109/IEDM.2002.1175883