Transient response characterization of ohmic contact RF MEMS switches

The experimental characterization of the transient response within ohmic contact series RF MEMS switches is demonstrated in this paper. Standard devices are inserted into a time domain test setup, and the transient response is measured using an oscilloscope. The experimental results show that high-o...

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Bibliographic Details
Main Authors: Gu Hong-ming, Lu Miao, Zhou Xue-feng, Liang Chun-guang, Gao Bao-xin
Format: Conference Proceeding
Language:English
Subjects:
Capacitors
Fabrication
Microswitches
Ohmic contacts
Radiofrequency microelectromechanical systems
Structural beams
Switches
Testing
Transient response
Voltage control
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Summary:The experimental characterization of the transient response within ohmic contact series RF MEMS switches is demonstrated in this paper. Standard devices are inserted into a time domain test setup, and the transient response is measured using an oscilloscope. The experimental results show that high-order mechanical vibration modes occur during the switching cycle. The response of the switch is analyzed by mechanical theory. This transient response characterization will lend deep insight into factors affecting the switch lifetime.
DOI:10.1109/ICMMT.2002.1187688