High quality YBa/sub 2/Cu/sub 3/O/sub 7-/spl delta// Josephson junctions and junction arrays fabricated by masked proton beam irradiation damage

High quality single Josephson junctions and junction arrays with 10 junctions in series have been fabricated using masked proton beam irradiation damage technology. Monte Carlo simulation of the irradiation damage profile underneath the metal mask has been carried out systematically to guide the met...

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Bibliographic Details
Published in:IEEE transactions on applied superconductivity 2003-06, Vol.13 (2), p.889-892
Main Authors: Nianhua Peng, Dae Joon Kang, Jeynes, C., Webb, R.P., Moore, D.F., Blamire, M.G., Chakarov, I.R.
Format: Article
Language:English
Subjects:
Contamination
Electron beams
Fabrication
Gold
Ion beams
Josephson junctions
Niobium
Particle beams
Production
Yttrium barium copper oxide
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Summary:High quality single Josephson junctions and junction arrays with 10 junctions in series have been fabricated using masked proton beam irradiation damage technology. Monte Carlo simulation of the irradiation damage profile underneath the metal mask has been carried out systematically to guide the metal mask structure design. A high resolution and high aspect ratio metal mask opening was fabricated by focused 30 keV Ga ion beam milling. Various nonconducting oxide buffer layers have been investigated for a Ga contamination free mask fabrication. A contamination free irradiation process and subsequent removal of metal mask after ion irradiation are the keys for the improved properties of junctions fabricated with YBCO.
ISSN:1051-8223
1558-2515
DOI:10.1109/TASC.2003.814070