Design and characterization of integrated passive elements on high ohmic silicon

This work presents ultra low-loss coplanar waveguides and Marchand type baluns implemented in an optimized high ohmic silicon substrate technology for RF/microwave applications. The CPW configured baluns operate from 15 to 25 GHz with a minimum insertion loss of 0.8 dB at center frequency.

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Bibliographic Details
Main Authors: Valletta, E., Van Beek, J., Den Dekker, A., Pulsford, N., Jos, H.F.F., de Vreede, L.C.N., Nanver, L.K., Burghartz, J.N.
Format: Conference Proceeding
Language:English
Subjects:
Coplanar transmission lines
Coplanar waveguides
Distributed parameter circuits
Impedance matching
Microwave technology
Millimeter wave technology
Radio frequency
Silicon
Substrates
Transmission line theory
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Description
Summary:This work presents ultra low-loss coplanar waveguides and Marchand type baluns implemented in an optimized high ohmic silicon substrate technology for RF/microwave applications. The CPW configured baluns operate from 15 to 25 GHz with a minimum insertion loss of 0.8 dB at center frequency.
ISSN:0149-645X
2576-7216
DOI:10.1109/MWSYM.2003.1212592