High vertical aspect ratio LIGA microwave 3-dB coupler

This paper focuses on microwave directional couplers fabricated using synchrotron deep X-ray lithography (DXRL), an advanced micro- and nanofabrication technology allowing the design of microwave structures with improved performance by exploring the third dimension - metal height. Demonstrated are t...

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Bibliographic Details
Main Authors: Kachayev, A.A., Klymyshyn, D.M., Achenbach, S., Saile, V.
Format: Conference Proceeding
Language:English
Subjects:
Conductors
Coplanar waveguides
Directional couplers
Electromagnetic waveguides
Fabrication
Microstructure
Microwave technology
Radio frequency
Synchrotrons
X-ray lithography
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Description
Summary:This paper focuses on microwave directional couplers fabricated using synchrotron deep X-ray lithography (DXRL), an advanced micro- and nanofabrication technology allowing the design of microwave structures with improved performance by exploring the third dimension - metal height. Demonstrated are the influence of increased metal height on the structure characteristics and performance unattainable through conventional planar fabrication techniques.
DOI:10.1109/ICMENS.2003.1221961