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Fast and low-power thermooptic switch on thin silicon-on-insulator

We have designed and fabricated Mach-Zehnder interferometer thermooptic switches using a wafer-bonded thin-silicon-on-insulator materials system. The thermally switched devices use single-mode strip waveguides with dimensions 0.26×0.6 μm 2 , operating at a wavelength of /spl lambda/=1.55 μm. Useful...

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Bibliographic Details
Published in:IEEE photonics technology letters 2003-10, Vol.15 (10), p.1366-1368
Main Authors: Espinola, R.L., Tsai, M.C., Yardley, J.T., Osgood, R.M.
Format: Article
Language:English
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Summary:We have designed and fabricated Mach-Zehnder interferometer thermooptic switches using a wafer-bonded thin-silicon-on-insulator materials system. The thermally switched devices use single-mode strip waveguides with dimensions 0.26×0.6 μm 2 , operating at a wavelength of /spl lambda/=1.55 μm. Useful device characteristics include a low switching power, 50 mW, and a fast rise time of
ISSN:1041-1135
1941-0174
DOI:10.1109/LPT.2003.818246