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Fast and low-power thermooptic switch on thin silicon-on-insulator
We have designed and fabricated Mach-Zehnder interferometer thermooptic switches using a wafer-bonded thin-silicon-on-insulator materials system. The thermally switched devices use single-mode strip waveguides with dimensions 0.26×0.6 μm 2 , operating at a wavelength of /spl lambda/=1.55 μm. Useful...
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Published in: | IEEE photonics technology letters 2003-10, Vol.15 (10), p.1366-1368 |
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Main Authors: | , , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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Summary: | We have designed and fabricated Mach-Zehnder interferometer thermooptic switches using a wafer-bonded thin-silicon-on-insulator materials system. The thermally switched devices use single-mode strip waveguides with dimensions 0.26×0.6 μm 2 , operating at a wavelength of /spl lambda/=1.55 μm. Useful device characteristics include a low switching power, 50 mW, and a fast rise time of |
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ISSN: | 1041-1135 1941-0174 |
DOI: | 10.1109/LPT.2003.818246 |