A layered SAW based NO/sub 2/ sensor with a copper phthalocyanine selective layer

A multi-layered surface acoustic wave (SAW) transducers have been employed for nitrogen dioxide gas sensing applications. The structure composes of a SiO/sub 2/ guiding layer deposited on a 90/spl deg/ rotated ST-cut quartz crystal substrate with a thin film of copper phthalocyanine acting as the se...

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Bibliographic Details
Main Authors: Ippolito, S.J., Kalantar-Zadeh, K., Wlodarski, W., Galatsis, K., Fischer, W.J., Berger, O., Stab, H.
Format: Conference Proceeding
Language:English
Subjects:
Acoustic propagation
Acoustic sensors
Acoustic transducers
Acoustic waves
Copper
Nitrogen
Sputtering
Substrates
Surface acoustic wave devices
Surface acoustic waves
Online Access:Request full text
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Summary:A multi-layered surface acoustic wave (SAW) transducers have been employed for nitrogen dioxide gas sensing applications. The structure composes of a SiO/sub 2/ guiding layer deposited on a 90/spl deg/ rotated ST-cut quartz crystal substrate with a thin film of copper phthalocyanine acting as the selective layer. The dominant mode of acoustic propagation in the sensor is a combination of mainly a shear and a longitudinal displacement types. Such a structure has the advantage of confining the acoustic wave energy to the surface of the device, which increases the sensitivity of the system.
ISSN:1097-2137
2377-5505
DOI:10.1109/COMMAD.2002.1237218