Tunable RF MEMS microinductors for future communication systems

Tunable microinductors; can be designed controlling the magnetic coupling coefficient. This paper presents the design and fabrication of a new tunable RF MEMS microinductor. This component requires electrostatic actuators to control the inductance value. We report a 50% inductance variation from 1.5...

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Bibliographic Details
Main Authors: Tassetti, C.M., Lissorgues, G., Gilles, J.P.
Format: Conference Proceeding
Language:English
Subjects:
Communication system control
Couplings
Electrostatic actuators
Electrostatic measurements
Fabrication
Inductance measurement
Radiofrequency microelectromechanical systems
Semiconductor device modeling
Solid modeling
Testing
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Summary:Tunable microinductors; can be designed controlling the magnetic coupling coefficient. This paper presents the design and fabrication of a new tunable RF MEMS microinductor. This component requires electrostatic actuators to control the inductance value. We report a 50% inductance variation from 1.5 to 5GHz measured on test wafers. A method to compute the inductance variation due to the mechanical displacement is briefly described. A compact lumped element model, based on the geometry, gives results in good agreement with measurements in the RF frequency range.
DOI:10.1109/IMOC.2003.1244918