Simultaneous thickness and group index measurement using optical low-coherence reflectometry

Using high-resolution optical reflectometry, group index and physical thickness can both be determined by precisely measuring optical time delays through a sample. Optical low-coherence reflectometry offers both the high-spatial resolution and large dynamic range required to perform accurate measure...

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Bibliographic Details
Published in:IEEE photonics technology letters 1992-01, Vol.4 (1), p.105-107
Main Authors: Sorin, W.V., Gray, D.F.
Format: Article
Language:English
Subjects:
Electron optics
Gallium arsenide
HEMTs
Mirrors
Optical control
Optical devices
Optical interferometry
Optical mixing
Reflectometry
Thickness measurement
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Description
Summary:Using high-resolution optical reflectometry, group index and physical thickness can both be determined by precisely measuring optical time delays through a sample. Optical low-coherence reflectometry offers both the high-spatial resolution and large dynamic range required to perform accurate measurements using this technique.< >
ISSN:1041-1135
1941-0174
DOI:10.1109/68.124892