Procedure of measurement of ferroelectric films parameters using open resonator method

Presented in this paper are the measurements of ferroelectric film parameters (loss tangent, dielectric constant) based on quasioptical U-band resonator. The results of measurements of multiple structures and ferroelectric film parameters at frequency 50 GHz are presented.

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Bibliographic Details
Main Authors: Buslov, O.Y., Keys, V.N., Kozyrev, A.B., Kotelnikov, I.V., Kulik, P.V.
Format: Conference Proceeding
Language:English
Subjects:
Dielectric loss measurement
Dielectric measurements
Ferroelectric films
Hidden Markov models
IEEE catalog
Iron
Millimeter wave technology
Mirrors
Organizing
Pulse width modulation
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Description
Summary:Presented in this paper are the measurements of ferroelectric film parameters (loss tangent, dielectric constant) based on quasioptical U-band resonator. The results of measurements of multiple structures and ferroelectric film parameters at frequency 50 GHz are presented.
DOI:10.1109/CRMICO.2003.158981