Original MEMS-Based Single Pole Double Throw topology for millimeter wave space communications

This paper presents the design, fabrication and characterization of a MEMS-Based Single Pole Double Throw (SPDT) circuit for millimeterwave applications. High performances are achieved thanks to an original circuit design based on MEMS synthesized quarter wave line combined with surface and bulk mic...

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Bibliographic Details
Main Authors: Dubuc, D., Rabbia, L., Grenier, K., Pons, P., Vendier, O., Graffeuil, J., Plana, R.
Format: Conference Proceeding
Language:English
Subjects:
Circuit synthesis
Circuit topology
Fabrication
Insertion loss
Micromachining
Micromechanical devices
Millimeter wave circuits
Performance evaluation
Silicon
Surface waves
Online Access:Request full text
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Description
Summary:This paper presents the design, fabrication and characterization of a MEMS-Based Single Pole Double Throw (SPDT) circuit for millimeterwave applications. High performances are achieved thanks to an original circuit design based on MEMS synthesized quarter wave line combined with surface and bulk micromachinings of silicon. 0.6 dB insertion loss of the SPDT circuit was measured with an isolation of 21 dB at 30 GHz.
DOI:10.1109/EUMC.2003.177645