Metal contact RF MEMS switch elements for ultra wideband RF front-end systems

Metal contact RF MEMS switch circuit elements have been developed to be used as building blocks for wideband signal routing. A switch element can have up to four switches fabricated monolithically on a single GaAs chip. More complicated switch circuits can be constructed by assembling multiple basic...

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Bibliographic Details
Main Authors: Schaffner, J.H., Schmitz, A.E., Tsung-Yuan Hsu, Chang, D.T., Loo, R.Y., Sievenpiper, D.F.
Format: Conference Proceeding
Language:English
Subjects:
Assembly
Contacts
Gallium arsenide
Radio frequency
Radiofrequency microelectromechanical systems
RF signals
Routing
Switches
Switching circuits
Ultra wideband technology
Online Access:Request full text
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Summary:Metal contact RF MEMS switch circuit elements have been developed to be used as building blocks for wideband signal routing. A switch element can have up to four switches fabricated monolithically on a single GaAs chip. More complicated switch circuits can be constructed by assembling multiple basic switch elements on a hybrid RF interconnection printed circuit board. In this paper, two basic types of switch functions are presented, single-pole multiple-throw switch elements and matrix switch elements. Measured insertion loss and isolation performances of these circuits are presented.
DOI:10.1109/UWBST.2003.1267797