Pirani pressure sensor with distributed temperature measurement

Surface micromachined distributed Pirani pressure gauges, with designed heater-to-heat sink distances (gap-heights) of 0.35 /spl mu/rn and 1.10 /spl mu/m, are successfully fabricated, modeled and characterized. Measurements and model response correspond within 5 % of the measured value in a pressure...

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Bibliographic Details
Main Authors: de Jong, B.R., Bula, W.P., Zalewski, D., van Baar, J.J., Wiegerink, R.J.
Format: Conference Proceeding
Language:English
Subjects:
Biomembranes
Electrical resistance measurement
Heat sinks
Pressure gauges
Pressure measurement
Resistors
Sensor phenomena and characterization
Temperature distribution
Temperature measurement
Temperature sensors
Online Access:Request full text
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Summary:Surface micromachined distributed Pirani pressure gauges, with designed heater-to-heat sink distances (gap-heights) of 0.35 /spl mu/rn and 1.10 /spl mu/m, are successfully fabricated, modeled and characterized. Measurements and model response correspond within 5 % of the measured value in a pressure range of 10 to 2*10/sup 4/ Pa. The distributed nature of the sensor facilitates pressure measurement to be independent of the Temperature Coefficient of Resistance of the resistors. This also provides an inherent compensation for heat loss via the membrane supporting the heater, extending the lower pressure range.
DOI:10.1109/ICSENS.2003.1279033