MOCVD grown solar-blind photodetector arrays

We report on the growth and fabrication of back-illuminated solar-blind photodetector array based on the AlGaN material system using low-pressure metalorganic chemical vapor deposition. Discrete photodetector devices exhibited a high external quantum efficiency of 58% and 256/spl times/256 photodete...

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Bibliographic Details
Main Authors: Uttiya Chowdhury, Collins, C.J., Wong, M.M., Zhu, T.G., Denyszyn, J.C., Choi, J.-H., Campbell, J.C., Hairston, A., Lamarre, P., Wong, K.K., Cooke, C., Mullarkey, J., Reine, M., Dupuis, R.D.
Format: Conference Proceeding
Language:English
Subjects:
Absorption
Aluminum gallium nitride
Chemical vapor deposition
Lighting
MOCVD
Optical arrays
Optical device fabrication
P-i-n diodes
Photodetectors
Power supplies
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Summary:We report on the growth and fabrication of back-illuminated solar-blind photodetector array based on the AlGaN material system using low-pressure metalorganic chemical vapor deposition. Discrete photodetector devices exhibited a high external quantum efficiency of 58% and 256/spl times/256 photodetector arrays exhibited a high operability of >99%.