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Determination of the surface recombination velocity of unpassivated silicon from spectral photoconductance measurements
Bare, non-diffused silicon wafers of different resistivities and surface conditions have been analyzed with a spectral photoconductance technique. The surface recombination velocity has been calculated by fitting the measurements with a theoretical model. The main result is that the surface recombin...
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Main Authors: | , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Request full text |
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Summary: | Bare, non-diffused silicon wafers of different resistivities and surface conditions have been analyzed with a spectral photoconductance technique. The surface recombination velocity has been calculated by fitting the measurements with a theoretical model. The main result is that the surface recombination velocity is not constant, but decreases with increased resistivity, both for n-type and p-type wafers. The surface recombination velocity was found to vary from /spl sim/10 cm/s for 1000 /spl Omega/cm Si to /spl sim/10/sup 5/ cm/s for 0.3 /spl Omega/cm Si. These values are much lower than the previously assumed 'infinite' surface recombination velocity of 10/sup 6/-10/sup 7/ cm/s for bare silicon. |
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