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An interferometric sensor for integration with Si CMOS signal processing circuitry: "Sensor on a chip"
A scheme for integrating interferometric sensors with Si CMOS circuitry is presented. An integrated biological/chemical sensor provides a low cost, noninvasive alternative to traditional sensor technologies
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Main Authors: | , , , , , , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Request full text |
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Summary: | A scheme for integrating interferometric sensors with Si CMOS circuitry is presented. An integrated biological/chemical sensor provides a low cost, noninvasive alternative to traditional sensor technologies |
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