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An interferometric sensor for integration with Si CMOS signal processing circuitry: "Sensor on a chip"

A scheme for integrating interferometric sensors with Si CMOS circuitry is presented. An integrated biological/chemical sensor provides a low cost, noninvasive alternative to traditional sensor technologies

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Bibliographic Details
Main Authors: Thomas, M.A., Lillie, J., Dae-Ik Kim, Ralph, S., Jokerst, N.M., Brooke, M., Dennis, K., Comeau, B., Henderson, C.L.
Format: Conference Proceeding
Language:English
Subjects:
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Summary:A scheme for integrating interferometric sensors with Si CMOS circuitry is presented. An integrated biological/chemical sensor provides a low cost, noninvasive alternative to traditional sensor technologies