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Planar electrooptic switches with PLZT deflectors hybrid integrated on Si substrates
Prototypes of electrooptic planar deflector switches are fabricated. Deflectors with epitaxial PLZT films are assembled on silica-on-silicon optical substrates. The switching operations are demonstrated at about 40 V and switching times less than 0.5 /spl mu/s.
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Main Authors: | , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Request full text |
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Summary: | Prototypes of electrooptic planar deflector switches are fabricated. Deflectors with epitaxial PLZT films are assembled on silica-on-silicon optical substrates. The switching operations are demonstrated at about 40 V and switching times less than 0.5 /spl mu/s. |
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DOI: | 10.1109/LEOS.2004.1363346 |