Study of CMOS APS responsivity enhancement: ring-shaped photodiode

In this brief, the possibilities of complementary metal-oxide-semiconductor (CMOS) active pixel sensor (APS) spectral response improvement are discussed. Thorough submicrometer scanning results obtained from various ring-shaped pixel photodiodes with different inner radius, implemented in a standard...

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Bibliographic Details
Published in:IEEE transactions on electron devices 2005-01, Vol.52 (1), p.126-129
Main Authors: Danov, T., Shcherback, I., Yadid-Pecht, O.
Format: Article
Language:English
Subjects:
Active pixel sensor (APS)
Applied sciences
complementary metal-oxide-semiconductor (CMOS) image sensor
Design. Technologies. Operation analysis. Testing
diffusion
Electronics
Exact sciences and technology
General equipment and techniques
Imaging devices
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Integrated circuits
minority carriers
Optoelectronic devices
photocurrent
Photodiodes
Physics
Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices
sensitivity
Sensors (chemical, optical, electrical, movement, gas, etc.)
remote sensing
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Summary:In this brief, the possibilities of complementary metal-oxide-semiconductor (CMOS) active pixel sensor (APS) spectral response improvement are discussed. Thorough submicrometer scanning results obtained from various ring-shaped pixel photodiodes with different inner radius, implemented in a standard CMOS 0.35-/spl mu/m technology, are compared with numerical computer simulations and verified analytically. The functional dependence of the pixel response on the ring opening size was discovered and formulated for various wavelengths illumination. We show that the photodiodes with a small ring-opening exhibit better sensitivity in the blue spectrum range (420-460 nm). Comparison between the simulation and measurement results shows a good agreement, hence, proving that specific photodiode designs enable to selectively improve pixel color sensitivity.
ISSN:0018-9383
1557-9646
DOI:10.1109/TED.2004.841224