Reducing residual vibrations through iterative learning control, with application to a wafer stage

This paper uses iterative learning control (ILC) to remove terminal residual vibrations. By carefully selecting the ILC observation and actuation windows, ILC brings the system to rest within a finite time interval using feedforward. Experiments conducted on an industrial high-precision set-up show...

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Bibliographic Details
Main Authors: van Oosten, C.L., Bosgra, O.H., Dijkstra, B.G.
Format: Conference Proceeding
Language:English
Subjects:
Adaptative systems
Analytical models
Applied sciences
Computer science
control theory
systems
Control systems
Control theory. Systems
Electrical equipment industry
Error correction
Exact sciences and technology
Feedback
Modelling and identification
Servomechanisms
Signal mapping
State estimation
Uncertainty
Vibration control
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Description
Summary:This paper uses iterative learning control (ILC) to remove terminal residual vibrations. By carefully selecting the ILC observation and actuation windows, ILC brings the system to rest within a finite time interval using feedforward. Experiments conducted on an industrial high-precision set-up show that the vibrations can be removed well within half the period of the dominant vibration. Estimation of the vibration state from different experiments shows that ILC does indeed remove the residual vibrations. Analysis of the experimental results show that the feedforward profile obtained through ILC outperforms feedforward profiles obtained through simulation of LQ-state feedback and does not suffer from model uncertainty.
ISSN:0743-1619
2378-5861
DOI:10.23919/ACC.2004.1384669