Effect of patterned copper layer on selective polymer removal by 355 nm laser

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Bibliographic Details
Main Authors: Balogh, B., Gordon, P., Berenyi, R., Illyefalvi-Vitez, Z.
Format: Conference Proceeding
Language:English
Subjects:
Applied sciences
Chemical lasers
Chemical technology
Copper
Drilling
Electronics
Etching
Exact sciences and technology
Laser modes
Materials
Optical control
Optical materials
Polymers
Pump lasers
Online Access:Request full text
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DOI:10.1109/POLYTR.2004.1402768