Performance comparison of MIM capacitors and metal finger capacitors for analog and RF applications

In this work, we compare silicon nitride MIM capacitors to metal finger capacitors and clarify the performance and cost trade-offs. Our measurements show that MIM capacitors are superior to metal finger capacitors in terms of matching and process tolerance, but equivalent metal finger capacitors hav...

Full description

Saved in:
Bibliographic Details
Main Authors: Lim, Q.S.I., Kordesch, A.V., Keating, R.A.
Format: Conference Proceeding
Language:English
Subjects:
CMOS process
Costs
Fingers
Metal-insulator structures
MIM capacitors
MOS capacitors
Parasitic capacitance
Q factor
Radio frequency
Switched capacitor circuits
Online Access:Request full text
Tags: Add Tag
No Tags, Be the first to tag this record!
Description
Summary:In this work, we compare silicon nitride MIM capacitors to metal finger capacitors and clarify the performance and cost trade-offs. Our measurements show that MIM capacitors are superior to metal finger capacitors in terms of matching and process tolerance, but equivalent metal finger capacitors have higher Q, lower voltage coefficient and lower temperature coefficient.
DOI:10.1109/RFM.2004.1411082