Optimized membrane configuration improves CMUT performance

The performance of a capacitive micromachined ultrasonic transducer (CMUT) was improved by optimizing its membrane configuration. CMUTs with three different membrane configurations: square, rectangular and tent, were designed and fabricated using a process based on the wafer-bonding technique. Paire...

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Bibliographic Details
Main Authors: Yongli Huang, Haeggstrom, E.O., Xuefeng Zhuang, Ergun, A.S., Khuri-Yakub, B.T.
Format: Conference Proceeding
Language:English
Subjects:
Bandwidth
Biomembranes
Design optimization
Electrodes
Fabrication
Laboratories
Medical tests
Testing
Ultrasonic transducers
Voltage
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Description
Summary:The performance of a capacitive micromachined ultrasonic transducer (CMUT) was improved by optimizing its membrane configuration. CMUTs with three different membrane configurations: square, rectangular and tent, were designed and fabricated using a process based on the wafer-bonding technique. Paired tests showed that improved transmission (TX) and reception (RX) efficiencies were achieved by using tent or rectangular membranes instead of square membranes. The improvements were 46% and 44% in TX and 43% and 65% in RX, respectively.
ISSN:1051-0117
DOI:10.1109/ULTSYM.2004.1417773