A CMOS analog integrated circuit for actuation and readout of a MEMS CO2 sensor

In this paper, we describe a system for actuation and readout of a MEMS CO 2 sensor based on a CMOS Analog Integrated Circuit. Typically, in such sensor system, two separate systems provide both the actuation and readout. This paper presents a system using one single PLL performing both task. This w...

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Bibliographic Details
Main Authors: Edvardsen, A.-E., Aune, A., Hok, B., Yitterdal, T.
Format: Conference Proceeding
Language:English
Subjects:
Bridge circuits
CMOS analog integrated circuits
Gas detectors
Integrated circuit technology
Micromechanical devices
Phase locked loops
Resistors
Resonance
Resonant frequency
Sensor systems
Online Access:Request full text
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Summary:In this paper, we describe a system for actuation and readout of a MEMS CO 2 sensor based on a CMOS Analog Integrated Circuit. Typically, in such sensor system, two separate systems provide both the actuation and readout. This paper presents a system using one single PLL performing both task. This work extends the sensor system described in [1] and [2] and is motivated out of a low-cost and miniaturizing perspective. A protorype has been implemented, that verifies the concept and shows the possibilities of making a small and integrated CO 2 sensor system.
DOI:10.1109/NORCHP.2004.1423814