Computer-aided engineering (CAE) applications in semiconductor device manufacturing and reliability

With the ever increasing complexity of semiconductor device designs, the need for designed-in manufacturability and reliability continues to present a challenge for successful semiconductor product introduction. Technology computer-aided design (TCAD) software tools provide the needed device physics...

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Main Authors: Groothuis, S., Meade, R.
Format: Conference Proceeding
Language:English
Subjects:
Application software
Computational modeling
Computer aided engineering
Computer aided manufacturing
Computer applications
Physics
Reliability engineering
Semiconductor device manufacture
Semiconductor device reliability
Semiconductor devices
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creator Groothuis, S.
Meade, R.
description With the ever increasing complexity of semiconductor device designs, the need for designed-in manufacturability and reliability continues to present a challenge for successful semiconductor product introduction. Technology computer-aided design (TCAD) software tools provide the needed device physics simulations for both functional and performance requirements. However, an innovative approach of using both TCAD tools and computer-aided engineering (CAE) simulation tools (e.g., used in other areas of physics and mechanical engineering) can provide a comprehensive solution to wafer fabrication and device reliability efforts
doi_str_mv 10.1109/WMED.2005.1431614
format conference_proceeding
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identifier ISSN: 1947-3834
ispartof 2005 IEEE Workshop on Microelectronics and Electron Devices, 2005. WMED '05, 2005, p.45-48
issn 1947-3834
1947-3842
language eng
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source IEEE Xplore All Conference Series
subjects Application software
Computational modeling
Computer aided engineering
Computer aided manufacturing
Computer applications
Physics
Reliability engineering
Semiconductor device manufacture
Semiconductor device reliability
Semiconductor devices
title Computer-aided engineering (CAE) applications in semiconductor device manufacturing and reliability
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