Research on a seven-wafer Si-based combustor for micro power generation

The paper presents preliminary results of our ongoing research program aimed at developing a seven-wafer Si-based combustor for micro power generation. An iterative computing process is developed for both system and components design. Primary results on fabrication of the micro combustor are describ...

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Bibliographic Details
Main Authors: Jin Yufeng, Shan Xue Chuan, Wang Zhenfeng, Wong, S.
Format: Conference Proceeding
Language:English
Subjects:
Combustion
Engines
Fabrication
Fluid dynamics
Fuels
Micromechanical devices
Power generation
Silicon carbide
Temperature
Turbines
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Summary:The paper presents preliminary results of our ongoing research program aimed at developing a seven-wafer Si-based combustor for micro power generation. An iterative computing process is developed for both system and components design. Primary results on fabrication of the micro combustor are described. Sealing a Kovar tube to the Si structure of the micro combustor by Kovar-glass-Si bonding is discussed. Instrumentation for testing the combustor is established. A temperature of 955/spl deg/C near the exit of the combustor was observed.
DOI:10.1109/ICSICT.2004.1435199