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High-T/sub c/ superconducting microstrip resonators and filters on LaAlO/sub 3
The authors discuss recent developments in high-Q microstrip resonators and filters using various deposition processes. They successfully developed sputtering, metalorganic vapor deposition (MOCVD), and laser deposition processes that produces high-quality high-T/sub c/ superconducting (HTS) films o...
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Main Authors: | , , , , , , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Request full text |
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Summary: | The authors discuss recent developments in high-Q microstrip resonators and filters using various deposition processes. They successfully developed sputtering, metalorganic vapor deposition (MOCVD), and laser deposition processes that produces high-quality high-T/sub c/ superconducting (HTS) films on LaAlO/sub 3/. For the double-sided MOCVD process, replacing the Ag ground plane with an HTS ground plane in silver ground plane eliminates extra surface losses due to normal metal ground conductors. These two-sided microwave circuits yield higher microwave performances than one-sided HTS circuits and much higher performance than identical Ag circuits. HTS surface resistances less than 330 mu Omega at 10 GHz were achieved. Q-values of 9600 at 1.3 GHz were achieved in meanderline resonators.< > |
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DOI: | 10.1109/FREQ.1991.145938 |