Growth manner and mechanical characteristics of amorphous carbon nanopillar grown by EB-CVD

Electron-beam induced chemical vapor deposition (EB-CVD) [ 1] has important advantages in fabricating true nanoscale 3D structures using lateral growth modes [2], in which the growth direction has a finite angle in an incident electron beam. A digitally controlled beam scanning system under stabiliz...

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Bibliographic Details
Main Authors: Okada, S., Mukawa, T., Kobayashi, R., Fujita, J., Ishida, M., Iehihashi, T., Ochiai, Y., Kaito, T., Matsui, S.
Format: Conference Proceeding
Language:English
Subjects:
Amorphous materials
Chemical technology
Chemical vapor deposition
Electron beams
Nanotechnology
National electric code
Physics
Pressure control
Resonance
Scanning electron microscopy
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Summary:Electron-beam induced chemical vapor deposition (EB-CVD) [ 1] has important advantages in fabricating true nanoscale 3D structures using lateral growth modes [2], in which the growth direction has a finite angle in an incident electron beam. A digitally controlled beam scanning system under stabilized local gas pressure was important in fabricating long nanopiIlars for a micro-to- nano resonator for nano electro-mechanical system (NEMS) device applications. We reported on the growth in the EB-CVD process in detail and Young’s modulus of the nanopillar.
DOI:10.1109/IMNC.2004.245721