IIIA-3 LSI and magnetic bubbles device fabrication by X-ray lithography

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Bibliographic Details
Published in:IEEE transactions on electron devices 1976-11, Vol.23 (11), p.1253-1253
Main Authors: Maydan, D., Coquin, G.A., Maldonado, J.R., Somekh, S., Taylor, G.N.
Format: Article
Language:English
Subjects:
Electron beams
Laboratories
Polymers
Random access memory
Resists
Substrates
X-ray lithography
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ISSN:0018-9383
1557-9646
DOI:10.1109/T-ED.1976.18608