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Combinatorial optimization of transparent conducting oxides (TCOs) for PV

Transparent conducting oxides (TCOs) can serve a variety of important functions in thin film photovoltaics such as transparent electrical contacts, antireflection coatings and chemical barriers. Two areas of particular interest are TCOs that can be deposited at low temperatures and TCOs with high ca...

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Main Authors: Perkins, J.D., Taylor, M.P., van HEST, M.F.A.M., Teplin, C.W., Alleman, J.L., Dabney, M.S., Gedvilas, L.M., Keyes, B.M., To, B., Readey, D.W., Delahoy, A.E., Guo, S., Ginley, D.S.
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creator Perkins, J.D.
Taylor, M.P.
van HEST, M.F.A.M.
Teplin, C.W.
Alleman, J.L.
Dabney, M.S.
Gedvilas, L.M.
Keyes, B.M.
To, B.
Readey, D.W.
Delahoy, A.E.
Guo, S.
Ginley, D.S.
description Transparent conducting oxides (TCOs) can serve a variety of important functions in thin film photovoltaics such as transparent electrical contacts, antireflection coatings and chemical barriers. Two areas of particular interest are TCOs that can be deposited at low temperatures and TCOs with high carrier mobilities. We have employed combinatorial high-throughput approaches to investigate both these areas. Conductivities of /spl sigma/ = 2500 /spl Omega//sup -1/-cm/sup -1/ have been obtained for In-Zn-O (IZO) films deposited at 100/spl deg/C and /spl sigma/ > 5000 /spl Omega//sup -1/-cm/sup -1/ for In-Ti-O (ITiO) and In-Mo-O (IMO) films deposited at 550/spl deg/C. The highest mobility obtained was 83 cm/sup 2//V-sec for ITiO deposited at 550/spl deg/C.
doi_str_mv 10.1109/PVSC.2005.1488090
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source IEEE Xplore All Conference Series
subjects Annealing
Chemicals
Coatings
Conductive films
Conductivity
Contacts
Libraries
Optical reflection
Photovoltaic cells
Temperature
title Combinatorial optimization of transparent conducting oxides (TCOs) for PV
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