The influence of technological process on properties and reliability of thick film layers

Thick film layers, and their properties, are the topic of this paper. Attention is paid to thick film resistors and particularly their behavior in connection with the trimming process. The influence of two methods of trimming was investigated and compared. Some samples were trimmed by a milling cutt...

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Bibliographic Details
Main Authors: Pelikanova, I.B., Konupka, T.
Format: Conference Proceeding
Language:English
Subjects:
Capacitance-voltage characteristics
Drilling machines
Electric resistance
Electrical resistance measurement
Laser beam cutting
Linearity
Milling
Resistors
Thick films
Voltage
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Summary:Thick film layers, and their properties, are the topic of this paper. Attention is paid to thick film resistors and particularly their behavior in connection with the trimming process. The influence of two methods of trimming was investigated and compared. Some samples were trimmed by a milling cutter and other samples were trimmed by laser. The change of resistance and non linearity of C-V characteristics were measured.
DOI:10.1109/ISSE.2004.1490444