A micromachined gyroscope with piezoresistance for both high performance Coriolis-effect detection and torsional vibration monitoring

A micromachined vibrating gyroscope with a novel piezoresistive scheme is designed, fabricated and tested. A piezoresistive sensing method for Coriolis-acceleration detection is used with both high sensitivity and high resonant frequency. A four-terminal piezoresistive element is used to monitor and...

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Bibliographic Details
Main Authors: Xuemeng Chen, Xinxin Li, Zhaohui Song, Shusen Huang, Yuelin Wang, Jiwei Jiao, Heng Yang, Ying Zhang
Format: Conference Proceeding
Language:English
Subjects:
Feedback loop
Frequency measurement
Gyroscopes
Monitoring
Noise measurement
Piezoresistance
Resonance
Resonant frequency
Temperature sensors
Testing
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Summary:A micromachined vibrating gyroscope with a novel piezoresistive scheme is designed, fabricated and tested. A piezoresistive sensing method for Coriolis-acceleration detection is used with both high sensitivity and high resonant frequency. A four-terminal piezoresistive element is used to monitor and stabilize the vibration amplitude of the driving mode through a feedback loop. With the same loop, temperature drift of the gyro's piezoresistive output can be on-chip compensated effectively. The gyro performance is measured, with the following results: resonance frequency in detection mode is 989 Hz; angular rate measurement range is /spl plusmn/ 300/spl deg//s; noise-limited angular rate resolution is 0.33/spl deg//s.
ISSN:2159-547X
DOI:10.1109/SENSOR.2005.1496373