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A novel CMOS compatible embedded nonvolatile memory with zero process adder
We demonstrate a CMOS compatible reprogrammable nonvolatile memory cell using a regular n-channel MOSFET with under-lapped source/drain diffusions that requires no extra processing steps in a standard 130nm CMOS logic technology. Experimental results indicate good endurance and retention characteris...
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Main Authors: | , , , , |
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Format: | Conference Proceeding |
Language: | English |
Subjects: | |
Online Access: | Request full text |
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Summary: | We demonstrate a CMOS compatible reprogrammable nonvolatile memory cell using a regular n-channel MOSFET with under-lapped source/drain diffusions that requires no extra processing steps in a standard 130nm CMOS logic technology. Experimental results indicate good endurance and retention characteristics. A strategy for optimizing programming efficiency is identified with the addition of one extra mask to introduce drain optimization implants. |
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ISSN: | 1087-4852 2576-9154 |
DOI: | 10.1109/MTDT.2005.12 |