Enhancement of TFT Performance by Low Temperature Oxygen Annealing

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Main Authors: Baine, P.T., Quinn, L.J., Lee, B., Mitchell, S.J.N., Armstrong, B.M., Gamble, H.S.
Format: Conference Proceeding
Language:English
Subjects:
Annealing
Dielectric substrates
Electric variables
Flat panel displays
Glass
Grain size
Oxygen
Plasma temperature
Silicon compounds
Thin film transistors
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creator Baine, P.T.
Quinn, L.J.
Lee, B.
Mitchell, S.J.N.
Armstrong, B.M.
Gamble, H.S.
description
doi_str_mv 10.1109/ESSDERC.1997.194522
format conference_proceeding
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identifier ISBN: 2863322214
ispartof 27th European Solid-State Device Research Conference, 1997, p.688-691
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language eng
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source IEEE Electronic Library (IEL) Conference Proceedings
subjects Annealing
Dielectric substrates
Electric variables
Flat panel displays
Glass
Grain size
Oxygen
Plasma temperature
Silicon compounds
Thin film transistors
title Enhancement of TFT Performance by Low Temperature Oxygen Annealing
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