Micro-cantilevers for gas sensing

Cantilevers fabricated from a SOI wafers using bulk micromachining are used in combination with polymer deposition to detect down to 25 ppm of toluene concentration in synthetic air. The cantilevers proposed are thermoelectrically actuated and the movement detection is done by piezoresistance in a W...

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Bibliographic Details
Main Authors: Morata, M., Amirola, J., Figueras, E., Fonseca, L., Santander, J., Gracia, I., Dominguez, M., Rodriguez, A., Horrillo, M.C., Cane, C.
Format: Conference Proceeding
Language:English
Subjects:
Actuators
Bridge circuits
Etching
Gas detectors
Optical resonators
Optical sensors
Piezoresistance
Resonance
Sensor arrays
Silicon
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Summary:Cantilevers fabricated from a SOI wafers using bulk micromachining are used in combination with polymer deposition to detect down to 25 ppm of toluene concentration in synthetic air. The cantilevers proposed are thermoelectrically actuated and the movement detection is done by piezoresistance in a Wheatstone bridge configuration.
ISSN:2163-4971
2643-1300
DOI:10.1109/SCED.2005.1504516