Gas medium effect on electrophysical properties of alumina irradiated with titanium ions

Ion-heat modification allow to adjust the surface conductivity of inorganic dielectrics from /spl sigma/=10/sup -15/ S to 10/sup -4/ S. The surface electrophysical and optical properties are stable after annealing in vacuum and in rare gases but they change in oxygen-contained mediums owing to inter...

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Bibliographic Details
Main Authors: Kabyshev, A.V., Konusov, F.V., Krivosheeva, N.V.
Format: Conference Proceeding
Language:English
Subjects:
Aluminum oxide
Annealing
Conductivity
Dielectrics
Gases
Kinetic theory
Particle beam optics
Photoconductivity
Stability
Titanium
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Summary:Ion-heat modification allow to adjust the surface conductivity of inorganic dielectrics from /spl sigma/=10/sup -15/ S to 10/sup -4/ S. The surface electrophysical and optical properties are stable after annealing in vacuum and in rare gases but they change in oxygen-contained mediums owing to interaction between defects and atmospheric oxygen. Energetic and kinetic characteristics of conduction, photoconduction, transport charge mechanisms and its stability after irradiation of the polycrystalline aluminium oxide with titanium ions (/spl Phi/=10/sup 7/ cm/sup -2/, E/sub 1/=100 keV) and subsequent annealing in vacuum and in air (P=1-10/sup 5/ Pa, T/sub am/=300-2000 K) were investigated. Induced defects and implanted ions accumulation and its integration into clusters and impurity-defects complexes, defects type transformation within complexes, defects charge exchange in clusters are determine the dependencies /spl sigma/(/spl Phi/,T/sub am/,T,t) in irradiated Al/sub 2/O/sub 3/ after annealing in vacuum. Oxygen-contained complexes with different electronic level spectra and stability, substitutional defect clusters and stoichiometric composition of compounds produced by ion-heat modification are determine the properties stability at the heating in air.
DOI:10.1109/KORUS.2005.1507677