Development of FeCo-based thin films for gigahertz applications

For improving high-frequency characteristics and soft magnetic properties of (Fe/sub 7/Co/sub 3/)B-based thin films, the effects of Ni addition and an oblique deposition method on the microstructures have been examined. The Ni addition to (Fe/sub 7/Co/sub 3/)B films was found to enhance B segregatio...

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Bibliographic Details
Published in:IEEE transactions on magnetics 2005-10, Vol.41 (10), p.3259-3261
Main Authors: Yu, E., Jong Sik Shim, Inyoung Kim, Jongryoul Kim, Suk Hee Han, Hi Jung Kim, Ki Hyeon Kim, Yamaguchi, M.
Format: Article
Language:English
Subjects:
Anisotropic magnetoresistance
Conductivity
Cross-disciplinary physics: materials science
rheology
Exact sciences and technology
Grain boundaries
High-frequency characteristics
Iron
Magnetic films
Magnetic properties
Magnetic resonance
Magnetism
Materials science
microstructural analysis
Microstructure
oblique deposition method
Other topics in materials science
Physics
soft magnetic thin film
Sputtering
Transistors
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Summary:For improving high-frequency characteristics and soft magnetic properties of (Fe/sub 7/Co/sub 3/)B-based thin films, the effects of Ni addition and an oblique deposition method on the microstructures have been examined. The Ni addition to (Fe/sub 7/Co/sub 3/)B films was found to enhance B segregation on grain boundaries, which resulted in the formation of a well-defined columnar structure and the increase of film resistivity. Utilizing the columnar structure, large in-plane anisotropy was induced by an oblique deposition method which enabled the control of the inclination angle of the columns. As a result, the ferromagnetic resonance of (Fe/sub 7/Co/sub 3/)/sub 71/Ni/sub 7/B/sub 22/ thin films reached 6.2GHz.
ISSN:0018-9464
1941-0069
DOI:10.1109/TMAG.2005.854667