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Holographic Interferometry Applied to Motion Studies of Ultrasonic Bonders
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Published in: | IEEE transactions on sonics and ultrasonics 1972-10, Vol.19 (4), p.453-460 |
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Main Authors: | , , |
Format: | Article |
Language: | English |
Subjects: | |
Citations: | Items that this one cites Items that cite this one |
Online Access: | Get full text |
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ISSN: | 0018-9537 2162-1403 |
DOI: | 10.1109/T-SU.1972.29704 |