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Holographic Interferometry Applied to Motion Studies of Ultrasonic Bonders

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Bibliographic Details
Published in:IEEE transactions on sonics and ultrasonics 1972-10, Vol.19 (4), p.453-460
Main Authors: Wilson, A.D., Martin, B.D., Strope, D.H.
Format: Article
Language:English
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ISSN:0018-9537
2162-1403
DOI:10.1109/T-SU.1972.29704