Development of two dimensional scanner-on-scanner for confocal laser scanning microscope "LEXT" series

A two dimensional (2-D) Scanner-on-scanner (SOS) has been developed for commercial confocal laser scanning microscope (LSM) "LEXT' series. The SOS consists of a newly developed electromagnetic MEMS scanner mounted on a commercially available galvanometric scanner, being inclined at 45deg....

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Bibliographic Details
Main Authors: Miyajima, H., Nishio, M., Kamiya, Y., Ogata, M., Sakai, Y., Inoue, H.
Format: Conference Proceeding
Language:English
Subjects:
Coils
Laser noise
Magnetic fields
Magnets
Micromechanical devices
Microscopy
Mirrors
Optical distortion
Optical sensors
Telephony
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Summary:A two dimensional (2-D) Scanner-on-scanner (SOS) has been developed for commercial confocal laser scanning microscope (LSM) "LEXT' series. The SOS consists of a newly developed electromagnetic MEMS scanner mounted on a commercially available galvanometric scanner, being inclined at 45deg. The SOS realizes much smaller distortion in the 2-D scanning pattern than that obtained by gimbaled type MEMS 2-D scanner. Key issue is miniaturizing the MEMS scanner so that it can be mounted onto the galvanometric scanner. It was realized by using a coil for both driving and sensing so that sensing output was increased, and thus size reduction of permanent magnets have become possible, leading to the scanner volume of approximately 9.3 % of the one previously developed for a LSM, Olympus OLS1200
ISSN:2160-5033
DOI:10.1109/OMEMS.2005.1540057