Design and simulation of RF MEMS switches for high switching speed and moderate voltage operation

In this paper we present the design and simulations of an RF MEMS switch with regard to its switching speed and pull-down voltage. The switch is required to fulfill the requirements of high speed and a moderate pull down voltage for the switching of CMUT (capacitive micromachined ultrasonic transduc...

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Bibliographic Details
Main Authors: Saha, S.C., Tajeshwar Singh, Saether, T.
Format: Conference Proceeding
Language:English
Subjects:
Biomembranes
Electrodes
Probes
Radiofrequency microelectromechanical systems
Signal processing
Switches
Telecommunication switching
Ultrasonic imaging
Ultrasonic transducers
Voltage
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Summary:In this paper we present the design and simulations of an RF MEMS switch with regard to its switching speed and pull-down voltage. The switch is required to fulfill the requirements of high speed and a moderate pull down voltage for the switching of CMUT (capacitive micromachined ultrasonic transducer) elements used for ultrasound imaging.
DOI:10.1109/RME.2005.1543046