Precise analogue characterization of MIM capacitors using an improved charge-based capacitance measurement (CBCM) technique

The MIM capacitor is a key building block for mixed signal design. To perform an accurate analogue characterization of the MIM capacitor, a precise technique based on an improved CBCM is proposed. A test structure containing the pass-gate implementation of the CBCM structures and the leakage current...

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Bibliographic Details
Main Authors: Zhenqiu Ning, Delecourt, H.-X., De Schepper, L., Gillon, R., Tack, M.
Format: Conference Proceeding
Language:English
Subjects:
Ambient intelligence
Capacitance measurement
Circuit testing
Dielectric measurements
Inverters
Linearity
MIM capacitors
Parasitic capacitance
Signal design
Voltage
Online Access:Request full text
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Description
Summary:The MIM capacitor is a key building block for mixed signal design. To perform an accurate analogue characterization of the MIM capacitor, a precise technique based on an improved CBCM is proposed. A test structure containing the pass-gate implementation of the CBCM structures and the leakage current suppression circuits has been designed, fabricated and tested in AMIS 0.35 mm process. The technique has been proven to be accurate, robust and easy to use for the analogue characterization of the MIM capacitors.
ISSN:1930-8876
DOI:10.1109/ESSDER.2005.1546637