A MEMS-based coupled-cavity tunable optical filter

In this or we present the design of the first MEMS based tunable optical filter that satisfies a 20dB to 3dB bandwidth ratio of only 3. The design is based on the coupled cavity approach and its tuning is achieved using electrostatic actuation. The electro mechanical simulation using the finite elem...

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Bibliographic Details
Main Authors: Gheith, M., Hussein, A., Madkour, K., Saadany, B., Khalil, D.
Format: Conference Proceeding
Language:English
Subjects:
Biomembranes
Coatings
Dielectrics
Finite element methods
Micromechanical devices
Mirrors
Optical coupling
Optical filters
Silicon
Wavelength division multiplexing
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Summary:In this or we present the design of the first MEMS based tunable optical filter that satisfies a 20dB to 3dB bandwidth ratio of only 3. The design is based on the coupled cavity approach and its tuning is achieved using electrostatic actuation. The electro mechanical simulation using the finite element method (FEM) shows a settling time in the order of tens of microseconds.
ISSN:1548-3746
1558-3899
DOI:10.1109/MWSCAS.2003.1562463